By recovering and reusing the abrasive grains and liquid contained in slurry from semiconductor wafer cutting, this system makes it possible to significantly reduce both running costs and the volume of waste generated.

Overview of the Slurry Recycling System

①Used slurry discharged from processing machines is separated by a centrifugal separator to recover the abrasive grains.
②The slurry undergoes an additional centrifugal separation to recover the dispersant, while chips and debris are discarded.
③The recovered abrasive grains and dispersant are then remixed, and fresh slurry components (new abrasive grains and dispersant) are added to produce regenerated slurry for reuse.

◆ Achieving High Recycling Efficiency
Recovery rates of abrasives and solvents (such as coolants) exceed 80%
(subject to variation depending on slurry properties)
◆ Fully Automated, Operator-Free Operation
Continuous automatic control enables stable performance without manual intervention.
◆ Customizable Unit-Based Design
Layouts can be tailored to match available installation space, with proposals provided for optimal integration.

【Recycling Examples】
Slurry from semiconductor silicon processing
Slurry from semiconductor special materials (rare metals)
Slurry from solar cell silicon processing
Slurry from glass polishing

Reference: Abrasive Recovery System – Product Information, Machinery Division | Tomoe Engineering Co., Ltd. (tomo-e.co.jp)

◆ Recovery and Reuse of Valuable Materials
Valuable substances in liquids (such as rare metals) are recovered as concentrated solutions. Liquids used in grinding can also be reused, reducing resource consumption.
◆ Operation Management According to Recovered Materials
The system monitors the pressure applied to the membrane to ensure stable filtration. Filtration and backwashing times can be adjusted depending on the type of material being recovered.
◆ Customizable Unit-Based Design
Unit-based design allows flexible layouts tailored to installation space, with layout planning and proposals provided to optimize factory integration.

【Recycling Examples】
Semiconductor grinding wastewater
Polishing wastewater

Reference: Ceramic Flat Membrane System | Water Treatment Products | Meidensha Co., Ltd. (meidensha.co.jp)

◆ Recovery and Reuse of Valuable Materials
Evaporated solvents can be cooled, recovered, and reused, improving resource efficiency.
◆ Wastewater Volume Reduction
Significantly reduces the amount of liquid waste, leading to major cost savings in industrial waste disposal.
◆ Use of Steam as a Heat Source
Utilizes low-pressure steam (waste steam) for vacuum concentration, making energy use more efficient.
◆ Fully Automated, Operator-Free Operation
Concentration ratios are automatically controlled and monitored to prevent over- or under-concentration. With intuitive touch-panel operation, no specialized daily tasks are required.
◆ Customizable Unit-Based Design
The unit-based design allows flexible layouts tailored to available installation space, with proposals provided for optimal integration.

◆ Construction of Musical Fountain Systems
We provide comprehensive proposals for entire fountain systems, including lighting and speaker setups to enhance the performance.
◆ Programming of Water Movements and Lighting
Water displays and lighting effects are programmed in synchronization with music. The fountain can be designed to express the image of the music or reflect specific requests from clients.
◆ Settings According to Operating Hours and Weather
The system can be configured to operate at desired times and to adapt to weather conditions, ensuring flexible and reliable performance.

【Implementation Example】
Musical Fountain at Hekinan Seaside Park